VAPOR GROWTH DEVICE

PURPOSE:To simplify maintenance by rotating a susceptor on its own axis at a specific position in a vacuum vessel while turning a flow regulating means as surrounding the susceptor and fixedly supporting an air current guide combining the heating means of the susceptor and the cooling means of the susceptor to the vacuum vessel. CONSTITUTION:A plurality of susceptors 5 are driven and rotated on their own axes by a motor 10 through gears 51 mounted to each axis and a gear 15 engaged with these gears 51. A flow regulating means 6 is driven and rotated on its own axis by another motor 10 through a gear 61 integrally installed to the means 6 and a gear 16 engaged with the gear 61. A carrier gas containing a raw material gas is introduced into a vacuum vessel 1 from a raw-material gas supply port 2, and discharged to the outside of the vacuum vessel 1 from exhaust ports 7 through sections near the susceptors 5. Accordingly, the constitution of a device is simplified without lowering the thickness of a thin-film grown on a wafer and uniformity in a composition, thus simplifying maintenance.