AUTOMATIC ANALYZER FOR ELECTRON BEAM DIFFRACTION IMAGE

PURPOSE:To precisely carry out material identification of a sample in a short time by comparing both a distance and angle between grid surfaces with respect to the sample and a candidate material. CONSTITUTION:A sample to be analyzed is observed by an electron microscope 1, thus obtaining an electron beam diffraction image. Data of the electron beam diffraction image are input into an electronic computer 2 on the basis of the obtained electron beam diffraction image. The input distance data are converted into data of a distance between grid surfaces by the electronic computer 2. Subsequently, an allowable value of an error range for comparison with a candidate material is input. A possible candidate material is selected. Crystal grid data of the selected candidate material are extracted from a memory 4. The distance between grid surfaces is calculated on the basis of the extracted crystal grid data of the candidate material. It is judged whether or not the distance and angle between the grid surfaces are within the input error range with respect to the sample and the candidate material. Material identification of the sample is carried out on the basis of the judgment result, for printing out with a printer 6.