WIRE BONDING APPARATUS
PURPOSE:To make the discharge region on a torch electrode definite and to obtain a stable ball diameter by using a wire torch electrode protruding form a axial hole at a mother-body torch electrode as a torch electrode as well as to restrain a change in an electric-field distribution by the wear of...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To make the discharge region on a torch electrode definite and to obtain a stable ball diameter by using a wire torch electrode protruding form a axial hole at a mother-body torch electrode as a torch electrode as well as to restrain a change in an electric-field distribution by the wear of the wire torch electrode, to make the replacement of the electrode hardly necessary and to enhance the efficiency of a wire bonding operation by making the protruding amount of the wire torch electrode always definite. CONSTITUTION:At a wire bonding apparatus 11, a ball 13 is melted and formed at the tip of A bonding wire by means of an arc discharge between the bonding wire and a torch electrode 20. In the apparatus, the torch electrode is so constituted as to be provided with the following: a mother-body torch electrode 22 having a axial hole; and a wire torch electrode 23 which is passed through the axial hole in the mother-body torch electrode and which protrudes to the side of the bonding wire from the opening of the axial hole. |
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