BICRYSTAL SUBSTRATE

PURPOSE:To improve reproducibility and stability of characteristics at low noise by providing a second phase on the surface of a bicrystal substrate consisting of at least two or more Si single crystals. CONSTITUTION:Using two single crystal blocks 1 and 2 as substrate material, a surface (001) is f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUZUKI HAJIME, MUTO MUTSUHARU, YAMASHITA TSUTOMU, OSAKA YUKIO, MIYOUREN HIROAKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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