FORMING METHOD OF PHOTOMAGNETIC RECORDING MEDIUM
PURPOSE:To increase coercive force, by a method wherein, when a recording film of photomagnetic recording medium having Pt/Co lamination structure is formed, it is formed under the condition that the film formation rate of Pt and that of Co are lower than or equal to 34Angstrom /min and 10Angstrom /...
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Zusammenfassung: | PURPOSE:To increase coercive force, by a method wherein, when a recording film of photomagnetic recording medium having Pt/Co lamination structure is formed, it is formed under the condition that the film formation rate of Pt and that of Co are lower than or equal to 34Angstrom /min and 10Angstrom /min, respectively. CONSTITUTION:Co layers 2 and Pt layer 3 are repeatedly laminated in this order on a glass substrate 1. When a Pt/Co lamination film is formed on the substrate 1, a rotary shaft 8 is set as a rotation center, a substrate holder 9 is rotated, and a Co target 6 and a Pt target 7 are subjected to sputtering by a power supply 10 and a power supply 11, respectively. When the substrate 1 comes to a region facing the Co target 6 isolated by a partition 5, a Co layer is formed. When the substrate 1 comes to a region facing the Pt target 7, a Pt layer is formed. When these layers are formed under the condition that the film formation rate of Pt and that of Co are lower than or equal to 34Angstrom /min and 10Angstrom /min, respectively, the coercive force becomes higher than or equal to 700Oe. Thus the coercive force having a level capable of practical use can be obtained. |
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