INSPECTING METHOD OF COLOR FILTER
PURPOSE:To effectively detect a defect when colors are mixed (for example, a blue pixel is overlapped partly on a red pixel) without processing the image. CONSTITUTION:For a detecting light from a color filter 100, both a permeating light from a first light source L1 and a reflecting light from a se...
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Zusammenfassung: | PURPOSE:To effectively detect a defect when colors are mixed (for example, a blue pixel is overlapped partly on a red pixel) without processing the image. CONSTITUTION:For a detecting light from a color filter 100, both a permeating light from a first light source L1 and a reflecting light from a second light source L2 are used. It is difficult to distinguish a defect resulting from the mixing of colors from a light shield pattern 40 only with use of the data of the permeating light. Since the color pixel material has a low reflectivity although the light shield pattern 40 has a high reflectivity of light, the defect as a result of the mixing of colors can be clearly distinguished from the shield pattern 40 with use of the data of the reflecting light. |
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