DISK FILM FORMING DEVICE

PURPOSE:To miniaturize and to make compact disk carrying path by carrying a disk along a carrying loop path while positioning the disk-sustaining means in respective working chambers by using a rotary index type carrying means and forming a film onto the inside and outside of the disk simultaneously...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SAWASE FUMIHIKO, KANEKO SHINICHI, URA KAZUHIRO, SANO MAKOTO, KIMURA EIJI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PURPOSE:To miniaturize and to make compact disk carrying path by carrying a disk along a carrying loop path while positioning the disk-sustaining means in respective working chambers by using a rotary index type carrying means and forming a film onto the inside and outside of the disk simultaneously. CONSTITUTION:The main body of the device 1 is constituted of a fixed housing 2 of almost circular shape and a hollow rotary carrying drum 3. The delivery of disk D is executed by the disk chacking unit 22 between a disk handling means 25 and a spindle 12 provided in a carrying in-and-out chamber 4a of the disk. Then, a drum 3 is rotated by about 60 deg. stepwise and the disk D is carried by passing along a path 5 through a heating chamber 4b, a primary ground layer forming chamber 4c, a secondary ground layer forming chamber 4d, a magnetic film forming chamber 4c and to a protective film forming chamber 4f successively, and after finishing all of these treatments, the treated disk D is taken out from the carrying-in and-out chamber 4a. By this method, reduction of vacuum zone space for the main body device 1 is attained.