GAS PIPING METHOD

PURPOSE:To enable the gas system on a semiconductor manufacturing device side to be purged efficiently and safely within a short time by a method wherein a valve box having the gas system composed of a nitrogen purge line, a vacuum purge line and a semiconductor gas feed line is arranged close to th...

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Bibliographische Detailangaben
1. Verfasser:	SAKAI KATSUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To enable the gas system on a semiconductor manufacturing device side to be purged efficiently and safely within a short time by a method wherein a valve box having the gas system composed of a nitrogen purge line, a vacuum purge line and a semiconductor gas feed line is arranged close to the semiconductor manufacturing device. CONSTITUTION:A valve box 2 and a gas piping 5 feed semiconductor gas to a semiconductor manufacturing device 1 and a cylinder cabinet 3 while the valve box 2 is arranged close to the semiconductor manufacturing device 1. On the other hand, the gas system parts and the pipings i.e., semiconductor gas feed lines 6, 7, a nitrogen purge line 8, a vacuum purge line 9, diaphragm valves 10, 10a-10g, a check valve 11 and a pressure gauge 12 are contained in the valve box 2.