LIQUID CRYSTAL DISPLAY ELEMENT
PURPOSE:To realize normal operation of an LSI chip with excellent reliability and to obtain an excellent displaying quality by selectively reducing a part of an ITO electrode to decrease resistance of the ITO electrode. CONSTITUTION:After an ITO film is formed on a glass substrate by a well known me...
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Zusammenfassung: | PURPOSE:To realize normal operation of an LSI chip with excellent reliability and to obtain an excellent displaying quality by selectively reducing a part of an ITO electrode to decrease resistance of the ITO electrode. CONSTITUTION:After an ITO film is formed on a glass substrate by a well known method such as spattering, photo resist 11 is applied to the ITO film, and then exposure through a mask and development are conducted to etch the ITO film so as to form a pattern of a specified ITO electrode 10. Then, the glass substrate is exposed to a reducible atmosphere such as hydrogen plasma to reduce side faces of the ITO electrode 10 to remove the photo resist 11 on the surfaces thereof, thus obtaining a reduced ITO electrode 12. The obtained ITO electrode, whose side face portions in the circumference only are reduced selectively, can be decreased in resistance. Selective reduction of a portion of the ITO electrode in a liquid crystal display panel so as to decrease resistance of the ITO electrode in this way can realize normal operation of a liquid crystal driving LSI chip packaged on the glass substrate of the liquid crystal display panel and can provide an excellent displaying quality. |
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