PROXIMITY EXPOSURE DEVICE AS WELL AS SUBSTRATE POSITIONING DEVICE

PURPOSE:To prevent generation of flaws on a substrate surface by moving in a floating manner a printed circuit board to the position of a positioning roller without being contact with a printed circuit board placing base or a printed circuit board attraction plate by the air sliding method. CONSTITU...

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Bibliographische Detailangaben
Hauptverfasser:	KAN YOSHIJI, KUNI TOMOHIRO, KENBO YUKIO, TAKAHARA TAKESHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTED CIRCUITS
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Beschreibung
Zusammenfassung:	PURPOSE:To prevent generation of flaws on a substrate surface by moving in a floating manner a printed circuit board to the position of a positioning roller without being contact with a printed circuit board placing base or a printed circuit board attraction plate by the air sliding method. CONSTITUTION:A printed circuit board 9 is arbitrarily placed on a printed circuit board placing base 1, and a clean air is supplied to an air blowing nozzle 2a for floating the printed circuit board through a distributor 7a and piping 6a after an valve is opened according to a command from a controller, then the printed circuit board 9 is in a non-contact state while it is floated from the base 1. Then the printed circuit board 9 in a floating state is moved to the side of positioning roller, and two sides CB, BD of the printed circuit board 9 is pushed against a positioning roller 3. Thereafter, a position completion detection sensor 4 detects the respective sides CB, BD, the supply of clean air is stopped, and it is fixed on the base 1. With this constitution, generation of flaw can be prevented.