APPARATUS AND METHOD FOR CORRECTING POSITION

PURPOSE:To enable a processed surface to be aligned accurately even when it is set in two dimensions for a circuit base board, by mounting, a transparent member for a second reference position on which a second reference marking is provided, on a processing head, and by providing this member between a second camera and a first reference marking provided on a carrying base for base boards. CONSTITUTION:A carrying base 30 for base boards is moved horizontally by a movable table 20 for an X axis, and is stopped at the position below a processing head 10. At this time, the moving quantity of the carrying base 30 for base boards is measured by a linear scale, and is outputted to a control device 62. At the same time, a marking M1 for a reference position is photographed by a second camera LC mounted on the side face of the processing head 10. At this time, the second camera LC also photographs simultaneously, a second marking M2 for the alignment of a second reference position, which is put on the surface of a transparent film or glass 110 mounted on the side face of the processing head 10, and the photographed second marking M2 is sent to the control device 62. Thereby, the control device 62 aligns mechanically the marking Ml with the marking M2.