MANUFACTURE OF SOLID STATE IMAGE PICKUP DEVICE

PURPOSE:To manufacture a solid image pickup element, which can reduce the dark current of a photoelectric transfer part and the noise of the device, by forming a gate oxide film and an electrode at the surface of a semiconductor substrate, and then, depositing an insulating film by chemical vapor gr...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	IWAWAKI NAOKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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