SURFACE INSPECTION METHOD FOR COLOR FILTER

PURPOSE:To enable an abnormality such as a foreign material deposit and a flaw on the surface of a color filter to be easily detected visually by irradiating a visible ray to the surface of a reference glass plate, and detecting a position where an interference fringe occurs due to the irradiation of the visible ray, as an abnormality. CONSTITUTION:If a foreign material 42, for example, is deposited on the surface of a color filter base material 41, a gap 44 is formed between the base material 41 and a reference glass plate 43 adhering thereto. Monochromatic light is irradiated to the gap 44 from a light source provided above the inspected surface of a color filter. A concentric interference fringe 45 is, then, formed about the foreign material 42, due to the difference of a reflection factor between the reference glass plate 43 and the gap 44. The occurrence of the interference fringe 45 can be easily identified visually and, therefore, the position of the occurrence of the interference fringe 45 can be detected as an abnormality on the surface of the color filter laid on the surface of the base material 41.