METHOD FOR COATING BASE BODY WITH FILM

PURPOSE:To form a film good in uniformity of film thickness at the high coating velocity on a base body having large area by deforming arc discharge plasma into sheet plasma by a magnetic field means and introducing a gaseous raw material and depositing the component of the gaseous raw material on t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OGINO ETSUO, NAKAI HIDEMI, MATSUMURA ETSUZO, OKADA KEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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