X-RAY SPECTRUM ANALYZER

PURPOSE:To set measurement conditions applicable for an analyzed sample by adding the ZAF quantitative simulated calculation capability to a computer performing the ZAF quantitative calculation. CONSTITUTION:An electron beam 7 emitted from an electron gun 3 is focused by a focusing lens 9, then it is finely squeezed by an objective lens 11 and fed to a sample 5. X-rays 13 are emitted from the sample 5 and fed to a spectral crystal 15 for spectrometry, then they are fed to the detecting face of an X-ray detector 17. The detector 17 outputs the electric signal corresponding to the X-rays fed to the detecting face to an amplifying circuit 19. The amplified electric signal is counted by a counting circuit 21, and the count signal is outputted from the circuit 21 to an arithmetic control device 23. Various commands are inputted to the device 23 by an input device 25. The device 23 activates the ZAF correction quantitative program stored in a memory 27 for quantitative calculation. The quantitative analysis value of an element (i), for example, is obtained under certain device measurement conditions.