OPTICAL INTEGRATED DEVICE AND METHOD OF MANUFACTURING THE SAME
PURPOSE: To reduce loss by arranging joint parts from a p-doped material to an n-doped or non-doped material apart a prescribed distance from waveguide films and arranging the p-doped material on a side opposite to the waveguide films of the joint parts. CONSTITUTION: The joint parts U1, U2 form the...
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Zusammenfassung: | PURPOSE: To reduce loss by arranging joint parts from a p-doped material to an n-doped or non-doped material apart a prescribed distance from waveguide films and arranging the p-doped material on a side opposite to the waveguide films of the joint parts. CONSTITUTION: The joint parts U1, U2 form the p-doped material of ribs R1, R2 to the n-doped or non-doped material of spacing films AS are arranged by parting from the waveguide film wS by the distance D corresponding to the thickness of the spacing film AS. The surface of the p -doped films KS1, KS2 are provided with metallic films MS1, MS2 and are brought into contact with metallic contact electrodes K1, K2 disposed on an electrical insulating film IS in the regions of contact windows O1, O2. A counter electrode K for these contact electrodes K1, K2 is disposed on the lower side of the n-doped substrate S. As a result, the loss is reduced. |
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