CERAMIC HEATER

PURPOSE:To stabilize strength and electric characteristics of electrode bonding part against heat cycle by preparing a metallizing layer, to which an electrode plate is brazed, on the surface of SiC/ZrB2 electroconductive ceramic and forming the metallizing layer from Ni and Cr plating layer. CONSTITUTION:The surface of a main body 1 of electroconductive ceramic comprising SiC and ZrB2 is brazed, washed by ultrasonic wave and Ni having excellent conductivity is subjected to direct electrolytic plating in order to uniform electrical conductivity of the surface ceramic to form a Ni layer (plating) 2 as a first layer. Then Cr which forms a strong reaction product Cr3Si from Si is subjected to direct electrolytic plating on the layer 2 during treatment by reaction heat to form a Cr (plating) layer 3 as a second layer. Then, in order to chemically bond Cr to Si in SiC/ZrB2 and to form a strong metallizing layer 4, the treatment by reaction heat is carried out in vacuum. Then an electrode plate is fixed to the layer 4 by brazing.