PHOTOSENSITIVE COMPOSITE AND UTILIZATION OF THE SAME
PURPOSE: To enhance the resolving power and various mechanical characteristics of a coating film and to form a permanent mask by incorporating a specified curable compd. and a specified photoinitiator into a compsn. CONSTITUTION: This compsn. contains curable cyanate ester or its prepolymer (A) and...
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Zusammenfassung: | PURPOSE: To enhance the resolving power and various mechanical characteristics of a coating film and to form a permanent mask by incorporating a specified curable compd. and a specified photoinitiator into a compsn. CONSTITUTION: This compsn. contains curable cyanate ester or its prepolymer (A) and a cationic photoinitiator (B). A compd. represented by formula I or its prepolymer is preferably used as the component A. Onium salt of a group VIa or VII element is preferably used as the component B when this compsn. is a positive type compsn. and an iron arene compd. represented by formula II is preferably used as the component B when this compsn. is a negative type compsn. In the formula I, A is a single bond, S, etc., R is H, 1-8C alkyl, etc., and (n) is 0-4. In the formula II, L is aryl and X is a non-nucleophilic anion. |
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