SOFT MAGNETIC THIN FILM AND MAGNETIC HEAD USING THIS FILM

PURPOSE:To prevent the deterioration in soft magnetic characteristics by alter nately depositing Fe or FeCo alloy and metallic films consisting of one kind of Ir, Re, Ru, Pt, Rh, Au, Ag, and Ta or the alloy films consisting of >=2 kinds thereof to constitute the soft magnetic thin film. CONSTITUTION:The soft magnetic thin film having 252nm film thickness is used for a main magnetic pole film 1 and a coil 5 is so wound as to enclose this film. An auxiliary magnetic pole 2 forms the return path of the magnetic head. Namely, the Ir, Re, Ru, Pt, Rh, Au, Ag, Ta which are the high melting metals or the alloy thereof are themselves extremely stable materials. Interdiffusion, therefore, hardly arises even if the laminated structure thereof with the Fe or Fe-Co alloy is formed and is subjected to >=400 deg.C heat treatment. On the other hand, the Fe or FeCo alloy is parted by the high melting materials and, therefore, the grain growth does not arise even if the heat treatment is executed. The soft magnetic characteristics which are good up to a relatively high temp. are maintained in this way.