GAS TYPE ANGULAR VELOCITY DETECTOR

PURPOSE:To detect the temp. change of gas at proper temp. by forming a gas passage and a bridge part to a semiconductor substrate by etching and providing a gas temp. detecting resistor composed of a metal having high resistance temp. coefficient to the bridge part. CONSTITUTION:Semicircles and half grooves are respectively formed to lower and upper semiconductor substrates 1, 2 by etching and both substrates are superposed one upon another to form a nozzle orifice 3 and a gas passage 4. The bridge part 5 stretched across the gas passage 4 is formed to the substrate 1 by etching and a gas temp. detecting resistor 6 composed of a metal material having high resistance temp. coefficient is provided to the bridge part 5. The bridge part 5 is provided on the upstream side of the passage 4 in the vicinity of a pair of the heat wires 71, 72 symmetrically provided on both sides of the center line of the passage 4. By applying voltage to the resistor 6, the temp. of the gas in the vicinity of the heat wires 71, 72 can be detected from the change of the resistance value of said resistor 6 without disturbing the gas flow in the passage 4.