FILM GROWING APPARATUS FOR SEMICONDUCTOR DEVICE

FILM GROWING APPARATUS FOR SEMICONDUCTOR DEVICE

PURPOSE:To reduce direct influence of contaminant of conveying belt on a wafer and to reduce characteristic malfunction of the wafer due to dusts by supplying and incorporating the wafer and a tray as a pair. CONSTITUTION:A supply elevator 1 as a semiconductor wafer supply unit, a containing elevato...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: IIDA MASAAKI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Beschreibung
Zusammenfassung:PURPOSE:To reduce direct influence of contaminant of conveying belt on a wafer and to reduce characteristic malfunction of the wafer due to dusts by supplying and incorporating the wafer and a tray as a pair. CONSTITUTION:A supply elevator 1 as a semiconductor wafer supply unit, a containing elevator 3 as a container, a preheater 8, a reaction chamber 2, and a conveying belt 5 are provided. A wafer 20 is supported to the tray 4 of a conveying jig to be conveyed in a series of processing steps of supplying the wafer 20, releasing the wafer 20 and incorporating the wafer 20. Thus, characteristic malfunction of the wafer 20 due to the dusts of the belt 5 can be reduced.