PRESSURE DETECTOR AND ITS MANUFACTURE

PURPOSE:To obtain superior coupling strength and to enable detection with stable output sensitivity by constituting a device with a glass layer of a flat surface coupled with a semiconductor chip and a swelling part which is formed at the peripheral edge of the flat part and holds the chip. CONSTITUTION:A sensing body 2 is made of Fe-Ni-Co alloy, its upper end surface center part is a diaphragm 21 for pressure reception, and an oxide layer 23 is formed over its entire top surface. Paste of low-fusion-point glass is printed on the layer 23 and calcined temporarily to form the glass layer 24 which is about 40 - 60 mum thickness. The swelling part which is about 10 mum height and about 0.75mm wideness is formed at the peripheral edge part of the layer 24. When the size of the semiconductor chip 3 and the size of the layer 24 are denoted as (a) and (b) respectively and the position shift of the chip 3 is set to about