HIGH ENERGY BEAM AND ALIGNING METHOD

PURPOSE:To allow the exact alignment of the high-energy beam by boring a work with a processing beam, detecting the position of the bored hole with a position detecting beam, and then previously calculating the relative positional deviation of the two beams. CONSTITUTION:The bored hole 9 is formed with the electron beam 1 for processing. The deposition of the bored hole 9 is detected by using the position detecting beam 1' lowered is energy density and the deviation quantity between the processing beam 1 and the position detecting beam 1' is previously measured. The position of a beam position detecting marker 2 is detected by using the position detecting beam 1'. The position s of the processing beam 1 and the position detecting marker 2 are calculated in accordance with the result of the detection and the relative position of the processing beam 1 with the desired position of the bored hole is calculated. The beam is aligned on the basis of this relative position. The high-energy beam is exactly aligned in this way.