SEMICONDUCTOR WAFER CASSETTE TRANSFER DEVICE

PURPOSE:To shorten the transfer time for cassettes and to contrive to improve productivity by a method wherein the cassettes on a receiving cassette yard are held by a transfer robot one by one and are transferred to a plurality of pieces of taking-out cassette yards capable of transferring the same kind of the cassettes a plurality of pieces by a plurality of pieces. CONSTITUTION:Cassettes 2 having wafers 1, which are treated by a treating device 3, in their interiors are held by an interdevice transfer robot 21, which is actuated by a designation of a host computer of a control device, one by one, are transferred on a traveling path 4 and are released from the holding and are put in parallel with one another on a receiving cassette yard 22c of a transfer station 22. Then, a transfer station robot 23 transfers the cassettes 2 to taking-out cassette yards 22a one by one by a designation of the host computer. At this time, the yards 22a are selected conforming to destinations of the cassettes 2. When the cassettes 2 on a yard 22a among the yards 22a reach a prescribed number of pieces, a carrier 13 directed by the computer is moved to a position to oppose to this yard 22a and thereafter, a holding part 13b is rotated at 90 deg. and the cassettes 2 are taken in the holding part from the yard 22a and are transferred to the following transfer station 22.