SILOXANE COMPOUND AND PRODUCTION THEREOF
NEW MATERIAL:A siloxane compound 1000-100000 in weight-average molecular weight and 0.8-10 in the ratio SiH/(R-O- and R-), made up of structures of formula I and formula II (R is lower alkyl), respectively, and having terminal groups of formula R-O- (when bound to Si) and formula R- (when bound to O...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | NEW MATERIAL:A siloxane compound 1000-100000 in weight-average molecular weight and 0.8-10 in the ratio SiH/(R-O- and R-), made up of structures of formula I and formula II (R is lower alkyl), respectively, and having terminal groups of formula R-O- (when bound to Si) and formula R- (when bound to O), respectively. USE:Film-forming liquids for semiconductor devices and an intermediate for other silicone compounds. PREPARATION:For example, a reaction is effected in dioxane solvent between trichlorosilane (with a concentration of |
---|