MANUFACTURING SYSTEM OF SEMICONDUCTOR DEVICE

PURPOSE:To improve the utilization factor of equipment by a method wherein a reference control part which obtains respective manufacturing conditions in accordance with information from a central control unit is provided and, further, an automatic condition setting part which sets the manufacturing conditions automatically is provided. CONSTITUTION:A storage case 3 in which unfinished goods or finished goods are stored and which has an individual identification mark 31, a central control unit 2 which receives information from each manufacturing apparatus and transmits information corresponding to the received information to each manufacturing apparatus through a communication line 4 and which has a communication control part 21, a communication control part 12 which transmits the detected identification mark 31 from the manufacturing apparatus 1 to the central control unit 2 through the communication line 4, and an automatic condition setting part 15 which sets the conditions for the respective processing means automatically in accordance with the given manufacturing conditions and which is incorporated by the manufacturing apparatus 1 are provided. With this constitution, the equipment utilization factor can be improved and high productivity multiple-type small-quantity production can be realized.