PRODUCTION OF DISILANE

PURPOSE:To obtain high purity disilane at a low cost by bringing monosilane into contact with an alumina catalyst or a multiple oxide catalyst contg. alumi na at a prescribed temp. CONSTITUTION:An alumina catalyst, preferably transition type alumina such as gamma- or eta-alumina or a multiple oxide catalyst contg. alumina is prepd. The multiple oxide catalyst is a solid material contg. Al oxide and the oxides of one or more kinds of metallic elements other than Al, e.g. silica alumina or zeolite. Monosilane is brought into contact with the catalyst at such a space velocity that the gaseous starting material is fed by about 2-20,000ml (expressed in terms of standard state) per 1ml catalyst per 1 hr. In this case, the reaction temp. is regulated to 50-400 deg.C, especially 100-350 deg.C. The formation of trisilane or higher silanes is inhibited and high purity disilane can be produced at a low cost.