METHOD AND APPARATUS FOR MEASURING CONCENTRATION OF FE IN FE-ZN PLATING

PURPOSE:To simply measure the concn. of Fe without being affected by thickness irregularity, the composition of a lower layer or the crystal orientation properties of a plating phase by calculating the difference between the spectra of a sample to be measured and that of a standard sample. CONSTITUTION:A drive means 2 is driven to simultaneously scan the first and second gamma-ray source 1a, 1b and a sample 3 to be measured and a standard sample 4 are respectively irradiated with gamma-rays at the same time. Internal conversion electrons are emitted from the sample 3 to be measured and the standard sample 4 corresponding to the scanning of the gamma-ray source 1a, 1b to be detected by the first and second detectors 5, 6. Subsequently, the peaks of the electrons or electromagnetic waves detected by the first and second detectors 5, 6 are analyzed by the first and second peak analysers 8, 9 and, thereafter, only the signals of peak spectra are selected from the intensity spectra of the electrons or electromagnetic waves corresponding to the scanning of the gamma-ray source to be sent to an operation part 10. In the operation part, the difference between two peak spectra is calculated and can be converted to the concn. of Fe using a calibration curve.