PRODUCTION OF SUPERCONDUCTIVE COMPOUND OXIDE FILM

PURPOSE:To obtain the subject superconductive film having a high superconduction property without a treatment such as postannealing by blowing O3 gas onto the film-forming surface of a substrate and then carrying out film forming of a compound oxide superconductive material layer using the spatterin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HARADA KEIZO, NAKANISHI SHUSUKE, ITOZAKI HIDEO, HIGAKI KENJIRO, YATSU SHUJI
Format: Patent
Sprache:eng
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