ARRAY TYPE PHOTODETECTIVE ELEMENT

PURPOSE:To shorten the manufacturing process of a photodetective element of this design and to improve it in reliability and sensitivity by a method wherein a common electrode composed of charge collecting parts provided with a large number of fine voids and a light blocking part of large area, individual electrodes correspondent to the charge collecting parts concerned, and a photoelectric conversion layer sandwiched between the common electrode and the individual electrodes are provided. CONSTITUTION:A metal film is formed on an insulating board 4, which is patterned so as to form photodetective parts at a prescribed pitch, and individual electrodes 2, 2... are arranged. Then, a stripe-like a-Si:H layer 3 is formed thereon. Thereafter, a metal film is formed thereon, which is patterned to form comb-like electrodes 1b, 1b... above the individual electrodes 2. A part 1a of wide area of the comb-like electrode is used to block light rays, and light rays are incident on the a-Si:H layer 3 through gaps between the electrodes 1a, 1b... to induce charge. As mentioned above, an optical shielding electrode and a charge collecting electrode are formed at the same time, so that a manufacturing process can be shortened, and an unstable transparent electrode of ITO or the like can be dispensed with, as a result a photodetective element of this design can be improved in reliability.