ION BEAM SCANNING CONTROLLER OF ION IMPLANTING DEVICE

PURPOSE:To generate such an impression voltage to each electrode as to meet the parallel scan conditions by generating two reference voltages, and controlling the impression voltage on the basis of a function depending upon these voltages. CONSTITUTION:Arrangement according to the present invention...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SAKURADA YUZO, TSUKAGOSHI OSAMU, KASHIMOTO KAZUHIRO, TAKEGAWA SHINYA, NIIKURA KOICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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