MAGNETIC DISK

PURPOSE:To obtain a magnetic disk having a protective lubrication layer without an interface by integrating protective and lubricating layers continuously into a protective lubricating layer. CONSTITUTION:A base layer 2 and a magnetic layer 3 are formed on a substrate 1 by sputtering and then the pr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHIGE NORIYUKI, HONDA YOSHINORI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To obtain a magnetic disk having a protective lubrication layer without an interface by integrating protective and lubricating layers continuously into a protective lubricating layer. CONSTITUTION:A base layer 2 and a magnetic layer 3 are formed on a substrate 1 by sputtering and then the protective lubricating layer 4 is formed by using a plasma CVD device. Namely, by combining a plasma polymerization method and plasma CVD, a solid protective layer and liquid lubrication layer are successively formed. In this method, the source gas for the protective layer is introduced to generate high energy plasma, and then the solid protective layer is formed by plasma CVD. Then the source monomers of the lubricant is introduced into the atmosphere while the source gas of the protective layer and the plasma energy is reduced, the liquid lubricating layer is formed continuously by plasma polymerization with low energy plasma. Thus, the protective layer and lubricating layer are formed at the same time without forming an interface.