LASER INSPECTION DEVICE

PURPOSE:To eliminate dust existing or generating in the device and to improve inspection accuracy by providing a supplying mechanism of laminar air flow above inspection optics and providing a exhausting mechanism below a carrier of members to be inspected. CONSTITUTION:The supplying mechanism of air laminar flow 13 is provided above the inspection optics 11 to supply laminar flow of clean air to the optics 11 and the carrier 12 of members to be inspected. The air exhausting mechanism 14 is provided below the carrier 12 to exhaust the air supplied from the mechanism 13 and passed through the optics 11 and the carrier 12 to the outside of the device. The supplying mechanism essentially consists of a branched tube 13A and punch metal plates 13B and sprays clean air uniformly in the whole inner space of the device. The clean air Ain flows through an air supplying tube 15, controller 16 and filter 17. The mechanism 14 exhausts the downflow air supplied from the mechanism 13 and passed through the optics 11 and the carrier 12 to a ventilation pipe 18 as an exhaust air Aout. By this method, air can be exhausted to the outside without raising dust inside, so that the inspection accuracy can be improved.