PRODUCTION OF ELECTRICALLY CONDUCTIVE TRANSPARENT FILM

PURPOSE:To produce an electrically conductive transparent film having superior bending resistance and hardly causing cracking by specifying the amt. of water released from a transparent org. polymer film as a substrate when a transparent thin film of In oxide, etc., is continuously formed on the pol...

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Bibliographische Detailangaben
Hauptverfasser:	YAMASHITA MICHIHIRO, WATANABE YASUMITSU, KITANO MASAKAZU
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PURPOSE:To produce an electrically conductive transparent film having superior bending resistance and hardly causing cracking by specifying the amt. of water released from a transparent org. polymer film as a substrate when a transparent thin film of In oxide, etc., is continuously formed on the polymer film. CONSTITUTION:When a transparent thin film of at least one of In and Sn oxides is continuously formed on a transparent org. polymer film such as a polyethylene terephthalate film as a substrate, the water content of the polymer film is previously reduced so that the amt. of water released from the film during the formation of the thin oxide film is regulated to