JPH0246560B

The present invention relates to the manufacturing process of semi-insulating gallium arsenide single crystal by pulling a seed crystal contacted with gallium arsenide melt which is obtained by heat-reacting gallium and arsenic in a crucible contained in a pressure container and is characteristic in...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TOYOSHIMA TOSHA, MIZUNIWA SEIJI, INADA TOMOKI, NAKAGAWA JUNKICHI, FUKUMOTO MASASHI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CRYSTAL GROWTH DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS METALLURGY NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	The present invention relates to the manufacturing process of semi-insulating gallium arsenide single crystal by pulling a seed crystal contacted with gallium arsenide melt which is obtained by heat-reacting gallium and arsenic in a crucible contained in a pressure container and is characteristic in providing a film layer of 8-20 mm thickness of melted boron oxide with less than 200 ppm water content under pressure controlled at 60 kg/cm2 and over during reaction and at 5-40 kg/cm2 during crystal growth in high purity inert gas atmosphere, and during said crystal growth, rotating said seed crystal and said crucible in the same direction, but said seed crystal being rotated 5-30 rpm faster than the said crucible, and setting the crystal growing plane of said seed crystal to be within +/-3 DEG from {100} plane.