SYSTEM FOR CONTROLLING CRYSTAL GROWTH

PURPOSE:To achieve accurate growth of a crystal by detecting a crystal growth state with a detection element composed of an image sensor capable of detecting a reflected high-energy electron diffraction pattern on a fluorescent screen and controlling a shutter based on the data of pattern recognitio...

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Bibliographische Detailangaben
1. Verfasser:	ODAKA HIROHISA
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CRYSTAL GROWTH ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PURPOSE:To achieve accurate growth of a crystal by detecting a crystal growth state with a detection element composed of an image sensor capable of detecting a reflected high-energy electron diffraction pattern on a fluorescent screen and controlling a shutter based on the data of pattern recognition. CONSTITUTION:A crystal is grown on a substrate by a molecular beam epitaxial(MBE) apparatus 1 by placing a shutter in front of a container containing a specimen to be grown and controlling the growth of the crystal by the opening of the shutter. In the above process, the state of crystal growth is detected by a one-dimensional or two-dimensional image sensor 16 as a diffraction pattern generated on a fluorescent screen by reflected high-energy electron beam, the image is inputted into a pattern recognition device 17 and a shutter-control signal is outputted from a shutter-control apparatus 18 to a shutter-driving mechanism 15 based on the pattern recognition data.