MANUAL PROBER

PURPOSE:To perform an inspection bringing probes into contact with both surfaces of an object by providing the probes capable of bringing into contact individually or simultaneously with each of both surfaces of the object to be inspected, driving mechanism and observing mechanism thereof. CONSTITUTION:The plural probes 5a, 5b, 6a, 6b are supported with each independent driving mechanism 7a, 7b, 8a, 8b at the corresponding positions on each of the 1st main surface 3a and 2nd main surface 3b forming both sides of the object 3 to be inspected which is held by a sample holder 2, and constituted so that an operation for three-dimensional displacement can be made against the main surfaces. Then, each probe are positioned while observing magnified pictures of the main surfaces 3a, 3b through TV cameras 9, 10 and displays 9a, 10b, and operated so as to bring them into contact with the inspecting parts. With this arrangement, the desirable inspection can be made in the manner of bringing the probes into contact by a manual operation while observing the inspecting parts on both surfaces of the plate-shaped object to be inspected.