MACHINING METHOD OF SUPERCONDUCTIVE THIN-FILM
PURPOSE:To machine an oxide superconductive thin-film, the characteristics of an oxide superconductor of which are not deteriorated, by forming a metallic layer having low reactivity onto the surface of the oxide superconductive thin- film and then a resist film onto the metallic layer. CONSTITUTION...
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| creator | TANAKA SABURO NAKANISHI SHUSUKE ITOZAKI HIDEO HIGAKI KENJIRO YATSU SHUJI |
| description | PURPOSE:To machine an oxide superconductive thin-film, the characteristics of an oxide superconductor of which are not deteriorated, by forming a metallic layer having low reactivity onto the surface of the oxide superconductive thin- film and then a resist film onto the metallic layer. CONSTITUTION:A metallic layer having low reactivity with an oxide superconductor constituting an oxide superconductive thin-film is formed onto the surface of the thin-film using a photolithographic technique, and a resist film onto the metallic layer. Consequently, since the oxide superconductive thin-film is not brought into contact directly with a resist, a developer, etc., and also receives no ion bombardment, characteristics thereof are not deteriorated. A metal having low resistivity with the oxide superconductor such as Ag, Al, In, etc., can be used as a metallic layer material. Accordingly, the oxide superconductive thin-film can be machined to various superconducting devices without lowering the superconductive characteristics of the thin-film. |
| format | Patent |
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CONSTITUTION:A metallic layer having low reactivity with an oxide superconductor constituting an oxide superconductive thin-film is formed onto the surface of the thin-film using a photolithographic technique, and a resist film onto the metallic layer. Consequently, since the oxide superconductive thin-film is not brought into contact directly with a resist, a developer, etc., and also receives no ion bombardment, characteristics thereof are not deteriorated. A metal having low resistivity with the oxide superconductor such as Ag, Al, In, etc., can be used as a metallic layer material. Accordingly, the oxide superconductive thin-film can be machined to various superconducting devices without lowering the superconductive characteristics of the thin-film.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CABLES CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F CONCRETE CONDUCTORS ELECTRICITY INORGANIC CHEMISTRY INSULATORS LIME, MAGNESIA METALLURGY REFRACTORIES SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES SLAG TREATMENT OF NATURAL STONE |
| title | MACHINING METHOD OF SUPERCONDUCTIVE THIN-FILM |
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