THIN FILM FORMATION

PURPOSE:To utilize the characteristics of a thin film in a vertical direction and to form an integrated device series by forming a thin film by allowing vapor deposition grains to adhere to a base material while moving a mask provided to the vicinity of the surface of the base material in a directio...

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Bibliographische Detailangaben
1. Verfasser: HYONO TADASHI
Format: Patent
Sprache:eng
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