SCREW VACUUM PUMP

PURPOSE:To prevent any obstruction of operation due to deposit irrespective of the amount of reaction product by providing a groove or recess in at least one position of the surface of a screw rotor, and cooling the mutually opposite walls of a bore. CONSTITUTION:When an input shaft 4 is rotated, a...

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1. Verfasser: KAMETANI HIROCHIKA
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE:To prevent any obstruction of operation due to deposit irrespective of the amount of reaction product by providing a groove or recess in at least one position of the surface of a screw rotor, and cooling the mutually opposite walls of a bore. CONSTITUTION:When an input shaft 4 is rotated, a clearance 6 between screw rotors 1 and 2 and a bore 3 is moved from a suction port 9 to a delivery port 10 to discharge exhaust gas. Grooves 11 and 12 are provided near respective center portions of the screw rotors 1 and 2, along the outer periphery of them, and cooling fluid pipes 14 are provided in the grooves. The gaseous reaction product is, therefore, deposited on the surfaces of the pipes 14 and deposit in a working chamber 6 can be prevented. Thus, reliability of the screw rotors can be increased without producing obstruction of the rotation of the screw rotors due to deposit.