IMAGE FORMING METHOD

PURPOSE:To improve the resolution of resist patterns by using a photoresist film formed by successively laminating a non-tacky photosensitive layer and tacky photosensitive layer having prescribed thicknesses on a base film. CONSTITUTION:The photoresist film is formed by successively laminating the...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TOMITA MASAO, SHIMOMURA MOTOHIDE
Format: Patent
Sprache:eng
Schlagworte:
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