SENSOR CONSTRUCTION HAVING ADHESIVE LAYER FOR THIN FILM PLATINUM ELEMENT

PURPOSE: To provide a sensor structure excellent in the stability even after the heat treatment with high temperature by using metallic oxide for strengthening an adhesive force between platinum and silicon nitride for an intermediate thin film layer. CONSTITUTION: A silicon base plate 40 is provide...

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Bibliographische Detailangaben
Hauptverfasser:	RONARUDO BII FUOSUTAA, ROBAATO JII JIYONSON, UTSUPIRI SURIDAA, JIEEMUSU OO HORUMEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS RESISTORS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE: To provide a sensor structure excellent in the stability even after the heat treatment with high temperature by using metallic oxide for strengthening an adhesive force between platinum and silicon nitride for an intermediate thin film layer. CONSTITUTION: A silicon base plate 40 is provided on the surface 41 with a silicon nitride film 42 to the surface 43 of which a very thin non-reactive metallic oxide layer 44 of 20-100 angstrom is attached, and a platinum thin film layer 45 is attached onto the layer 44. Chromium oxide, or the like is used for the metallic oxide. A surface oxidizing chrome adhesive layer 46 for promoting adhesion between the platinum layer 45 and a surrounding silicon nitride 47 may be used.