SUPERCONDUCTING MAGNETORESISTANCE ELEMENT
PURPOSE:To obtain a superconducting magnetoresistance element having good sensitivity and accuracy by a handling container by interposing a material constituting a weak bonding due to proximity effect between a plurality of membrane superconductor pieces formed on a non-magnetic substrate. CONSTITUT...
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Sprache: | eng |
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Zusammenfassung: | PURPOSE:To obtain a superconducting magnetoresistance element having good sensitivity and accuracy by a handling container by interposing a material constituting a weak bonding due to proximity effect between a plurality of membrane superconductor pieces formed on a non-magnetic substrate. CONSTITUTION:A superconducting film 2 is formed to a substrate 1 by a method wherein the substrate 1 is heated to about 650 deg.C and the vicinity of the substrate 1 is held in an oxidative atmosphere of about 5mTorr, and Y, Ba and Cu being raw materials are heated and evaporated by electron beam and oxidized before reaches the substrate. The parts to be bonded of said film 2 are bonded by a gold membrane 4 having a thickness of about 0.3mum using an electron beam vapor deposition or lift-off method to weakly bond superconductor pieces 3 in series. A bias current electrode 5 composed of a titanium membrane having a thickness of about 0.5mum and a voltage electrode 6 detecting the voltage generated by an element are formed to both ends of each superconductor piece 3. |
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