DEVICE FOR CONFIRMING FAULT OF PHOTOMASK

PURPOSE:To observe a wiring pattern and the fault of the pattern in excellent contrast by constituting an XY plotter so that it may be used both as the recording of a fault mark and the illumination to the photomask to be confirmed with spot light. CONSTITUTION:The fault of each photomask of a commo...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SHINPO SENJI, YOSHIZAWA TAKAO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTED CIRCUITS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PURPOSE:To observe a wiring pattern and the fault of the pattern in excellent contrast by constituting an XY plotter so that it may be used both as the recording of a fault mark and the illumination to the photomask to be confirmed with spot light. CONSTITUTION:The fault of each photomask of a common sheet 1 is previously detected by an appearance inspecting device 2 and the XY coordinate data of the fault is stored in a memory 5. Under the control of a microprocessor 4, the XY plotter 32 is actuated in accordance with the XY coordinate data read out and a carriage moves to a position corresponding to the coordinate data and stops, thereby recording the fault mark on a recording paper 34. At the same time, the position of the photomask corresponding to the fault mark is irradiated with the spot light. Thus, the photomask to be confirmed is irradiated with the spot light from below and the fault of the wiring pattern is easily and visually confirmed in the excellent contrast. Then, the recording paper 34 where the fault mark is recorded is superposed on the photomask to be confirmed if necessary so as to be used for a confirming operation.