POSITIVE AND NEGATIVELY TREATED RADIATION SENSITIVE MIXTURE AND RELIEF PATTERN

PURPOSE: To execute a high sensitivity alkali development capable of positive processing and negative processing by using a polymer or a polycondensation product of a reaction product of a phenol hydroxyl group-containing polymer with a dihydropyrane or the like or the other reaction products as a p...

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Hauptverfasser: RAINHORUTO SHIYUBUARUMU, HORUSUTO BINDAA
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE: To execute a high sensitivity alkali development capable of positive processing and negative processing by using a polymer or a polycondensation product of a reaction product of a phenol hydroxyl group-containing polymer with a dihydropyrane or the like or the other reaction products as a polymer binder. CONSTITUTION: As the polymer hinder, the polymer or the polycondensation product obtained by polymerizing or polycondensating the reaction product of the phenol hydroxyl group-containing polymer with dihydropyrane or an alkyl vinyl ether or the reaction product of the phenol hydroxyl group-containing monomer compound with dihydropyrane or the alkyl vinyl ether is used. As a result, a high activity radiation sensitive composition for forming a relief pattern, which is developed by the alkali aq. solution and is capable of positive processing and negative processing, is obtained.