POSITIVE AND NEGATIVELY TREATED RADIATION SENSITIVE MIXTURE AND RELIEF PATTERN
PURPOSE: To execute a high sensitivity alkali development capable of positive processing and negative processing by using a polymer or a polycondensation product of a reaction product of a phenol hydroxyl group-containing polymer with a dihydropyrane or the like or the other reaction products as a p...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PURPOSE: To execute a high sensitivity alkali development capable of positive processing and negative processing by using a polymer or a polycondensation product of a reaction product of a phenol hydroxyl group-containing polymer with a dihydropyrane or the like or the other reaction products as a polymer binder. CONSTITUTION: As the polymer hinder, the polymer or the polycondensation product obtained by polymerizing or polycondensating the reaction product of the phenol hydroxyl group-containing polymer with dihydropyrane or an alkyl vinyl ether or the reaction product of the phenol hydroxyl group-containing monomer compound with dihydropyrane or the alkyl vinyl ether is used. As a result, a high activity radiation sensitive composition for forming a relief pattern, which is developed by the alkali aq. solution and is capable of positive processing and negative processing, is obtained. |
---|