DOUBLE POLISHING METHOD FOR TITANIUM PLATE

PURPOSE:To produce a stable and specified polishing effect and to improve a yield by a method wherein, when both surfaces of a titanium plate are simultaneously polished in a sate to hold the titanium plate by means of carriers, a condition to satisfy a specified relation between the thickness of th...

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Bibliographische Detailangaben
Hauptverfasser: SUENAGA HIROYOSHI, MINAGAWA KUNINORI, FUKAI HIDEAKI, TAKEUCHI HIROYOSHI, ITO TAKESHI, TAKAGI MASAKUNI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To produce a stable and specified polishing effect and to improve a yield by a method wherein, when both surfaces of a titanium plate are simultaneously polished in a sate to hold the titanium plate by means of carriers, a condition to satisfy a specified relation between the thickness of the titanium plate and that of the carrier is kept. CONSTITUTION:A titanium plate 6 being a plate to be polished is held in a state to be loosely engaged with a carrier 5, and is moved linkage with movement of the carrier 5. Meanwhile, a polishing pressure from platens 1 and 2 is exerted on grinding particles 7 present on the surface of the titanium plate 6. The thickness of the titanium plate 6 is tmm and the thickness of the carrier 5 is Tmm and by setting a relation between the thicknesses to 0.025e