CHAMBER WITH POSITIONING MECHANISM AND ANALYZING DEVICE

PURPOSE:To efficiently utilize a wide wall surface of a chamber, namely, many surfaces for a multi-function processing by loading a movable table member on a rotation axis body formed in a semi-columnar shape, and holding the rotation axis body on an inner wall of the chamber. CONSTITUTION:The inside of a chamber 6 is allowed to form a vacuum by a vacuum exhaust system 8. A rotation axis 10 is rotated and positioned so that a sample 15 attached onto a Y table 12 is opposed to a processing port 7-1. Subsequently, by scanning X and Y tables 11, 12, a necessary processing is executed extending over a prescribed place or the whole of the surface of the sample 15. Next, the rotation axis 10 is rotated, and positioned so that the surface of the sample is opposed to a detecting port 7-2. In this state, by moving the X and Y tables 11, 12, a foreign matter, a defect and a flaw of the sample 15 are detected. By repeating the same procedure, many processings, detections and analyses can be executed in a short time in one chamber 6. Also, by leading in lean gas from a gas leading-in port 9, it is also possible to make various processing environments in the chamber 6.