MANUFACTURE OF THIN FILM NONLINEAR ELEMENT
PURPOSE:To improve a yielding rate drastically and lower a manufacturing cost by forming a metal oxide which turns to an insulator through anodic and thermal oxidation processes in the manufacture of thin film nonlinear element. CONSTITUTION:Metals which turn to a connecting electrode 3 and an insul...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | PURPOSE:To improve a yielding rate drastically and lower a manufacturing cost by forming a metal oxide which turns to an insulator through anodic and thermal oxidation processes in the manufacture of thin film nonlinear element. CONSTITUTION:Metals which turn to a connecting electrode 3 and an insulator 2 are sputtered on a substrate and sputtered metal surfaces are extensively oxidized into an anodic state. The metal and the oxide film which are oxidized into anodic states are patterned with a photo process and both sidefaces of a trapezoid metal are oxidized by thermal oxidation to form an insulating film. As soon as the formation of oxide film is complete, a connecting electrode is formed on the oxide film. |
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