PROBE JIG

PURPOSE:To shorten the setting time of a probe jig on a wafer prober as well as to utilize effectively periphery measuring circuit boards by a method wherein a connecting substrate for connection use with the circuit boards is provided and the jig is designed in such a way that it is inserted in the wafer prober from over. CONSTITUTION:A connecting substrate 8 for connection use with periphery measuring circuit boards 4 is provided on an adapter 2b. Moreover, signals to be sent from measuring circuits to probes 1 reach the probes 1 through wirings 7 of the boards 4, connecting pins 6, continuity holes 3b in the adapter 2b, continuity holes 10b in the substrate 8, wirings 9, continuity holes 10a, continuity holes 3a in the adapter 2b. On the other hand, a signal from a wafer reaches the measuring circuits in the order reverse to the above order. Accordingly, the connections between the connecting parts 10a of the probes 1 and the connecting parts 10b of the probes 1 with the boards 4 can be changed. Moreover, by modifying the substrate 8, the same boards 4 can be used for measurement of a plurality of kinds of wafers.