JPH0213822B

PURPOSE:To obtain the short channel CMOS transistor of high speed which enables enhancement of integration by surrounding both of source and drain of each of N-channel and P-channel transistors with the regions of opposited conductive type to that of the source and drain which comprise higher impuri...

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Bibliographische Detailangaben
Hauptverfasser: SAKAI YOSHIO, MASUHARA TOSHIAKI
Format: Patent
Sprache:eng
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